Title

Spectroscopic characterization of acid mobility in 248-nm chemically amplified resists.

Document Type

Article

Peer Reviewed

1

Publication Date

3-1-2000

Journal/Book/Conference Title

Abstracts of Papers of the American Chemical Society

Volume

219

Keywords

Sustainability

Published Article/Book Citation

Abstracts of Papers of the American Chemical Society, 219 (2000) pp.57-PMSE



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URL

http://ir.uiowa.edu/cee_pubs/86