Development of a Monolithic Active Pixel Sensor Using SOI Technology With a Thick Device Layer
IEEE Transactions on Nuclear Science
DOI of Published Version
Monolithic active pixel detectors fabricated in SOI (Silicon On Insulator) technology are novel sensors of ionizing radiation which exploit SOI substrates for the integration of readout electronics with a pixel detector. The fully-depleted sensing diode is manufactured under the SOI buried oxide (BOX) in the volume of the 'handle wafer', while readout circuitry occupies the upper silicon SOI 'device layer'. However, the initial prototypes suffered from significant leakage currents and early breakdown of pixel diodes. These effects limited the production yield. Moreover, the p-wells within the device layer extended to the interface with the BOX, which caused some local potential wells below the BOX at the top of the depleted sensor area. As a result, the effective charge collection efficiency was significantly decreased. This paper describes a solution for these problems employing a thicker 4 m SOI device layer. The use of this detector structure has increased the effective charge collection efficiency to over 99%. [ABSTRACT FROM AUTHOR]; Copyright of IEEE Transactions on Nuclear Science is the property of IEEE and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)
Published Article/Book Citation
IEEE Transactions on Nuclear Science, 57:1 (2010) pp.381-386.