US Patent 8,680,641
United States Patent and Trademark Office
University of Iowa Research Foundation (Iowa City, IA, US)
An article of manufacture and a method of defining a photodetector element are provided. The article of manufacture includes a photodector element comprising a junction formed by a first III-V semiconductor layer having a first charge type and a second III-V semiconductor layer comprising a second dopant having a second charge type. The second III-V semiconductor layer is disposed between the first III-V semiconductor layer and a wafer. Patterned dopant regions having a third charge type, the third charge type being the same as the first charge type, are disposed in the first III-V semiconductor layer.
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Prineas, John P; Olesberg, Jonathan T; and Coretsopoulos, Chris System and method of planar processing of semiconductors into detector arrays. US Patent 8,680,641 filed February 18, 2011 and issued March 25, 2014. https://ir.uiowa.edu/patents/614