US Patent 4,987,286
United States Patent and Trademark Office
University of Iowa Research Foundation (Iowa City, IA, US)
Method and apparatus for removing minute particles (as small as submicron) from a surface to which they are adhered. An energy transfer medium is interposed between each particle to be removed and the surface to which the particles are adhered. The medium is an irradiated with laser energy at a wavelength which is strongly absorbed by the medium. The medium absorbs sufficient energy to cause explosive evaporation with sufficient force to dislodge the particles. Preferably means are provided to remove dislodged particles to prevent redeposit on the surface.
Allen, Susan D. Method and apparatus for removing minute particles from a surface. US Patent 4,987,286 filed October 30, 1989 and issued January 22, 1991. https://ir.uiowa.edu/patents/82